General Analyzers : Keithley 590

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KEITHLEY 590
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590CV C-V Analyzer

The Keithley 590 CV Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Unlike other capacitance measurement instruments, the 590 has been tailored to the requirements of semiconductor device testing.

High frequency (100kHz or 1MHz) C-V measurements are commonly applied to test p-n or schottky junction and tal-Insulator-Semiconductor (MIS) devices for device characterization and process control. C-V results are highly correlated with performance parameters of functional devices such as FETs, memory cells, CCDs, and isolation structures.

Features:

  • 0.1fF sensitivity to test small devices
  • Ranges up to 20nF (at 100kHz, using the Model 5904 adapter) to test large, leaky, or forward biased devices
  • Test signal voltage of 15mV rms
  • Choice of 1MHz frequency for compliance with existing test standards or 100kHz for improved resolution, range, and accuracy
  • Selectable measurement rate (1 to 1000 readings per second) and filter to optimize speed/resolution trade-of
  • Sophisticated correction for transmission line errors due to device connections
  • Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming
  • 100kHz, 1MHz, or 100kHz/1MHz test frequencies
  • Measures capacitance (10fF-20nF) and conductance (0.1nS-1 MicroS)
  • Internal correction for errors due to cables, connections, and switching paths
  • Built-in test setup and correction value storage, analysis, and plotter control to minimize computer programming


  • 制造商: Keithley
  • 模型: 590