The Keithley 590 CV Analyzer measures capacitance versus voltage (C-V) and capacitance versus time (C-t) characteristics of semiconductor devices. Unlike other capacitance measurement instruments, the 590 has been tailored to the requirements of semiconductor device testing.
High frequency (100kHz or 1MHz) C-V measurements are commonly applied to test p-n or schottky junction and tal-Insulator-Semiconductor (MIS) devices for device characterization and process control. C-V results are highly correlated with performance parameters of functional devices such as FETs, memory cells, CCDs, and isolation structures.
Features:
0.1fF sensitivity to test small devices
Ranges up to 20nF (at 100kHz, using the Model 5904
adapter) to test large, leaky, or forward biased devices
Test signal voltage of 15mV rms
Choice of 1MHz frequency for compliance with existing
test standards or 100kHz for improved resolution, range, and accuracy
Selectable measurement rate (1 to 1000 readings per
second) and filter to optimize speed/resolution trade-of
Sophisticated correction for transmission line errors due
to device connections
Built-in test setup and correction value storage,
analysis, and plotter control to minimize computer programming
100kHz, 1MHz, or 100kHz/1MHz test frequencies
Measures capacitance (10fF-20nF) and conductance (0.1nS-1 MicroS)
Internal correction for errors due to cables,
connections, and switching paths
Built-in test setup and correction value storage,
analysis, and plotter control to minimize computer programming
