Performance:
With millions of hours in the field, Comdels CPS series generators have proven their ability to withstand erratic loads. Patented S-Technology provides optimized amplifier performance for ultra-stable output by reducing power gain changes due to plasma impedance fluctuations. S-Technology helps eliminate headaches from transmission line length, mismatch conditions and process reliability issues.
Applications:
The CPS series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems.
Features:
Solid state for long life and low maintenance
Class C linear design assures stability
ETL Marked and SEMI F47 compliant
Control circuitry ensures consistency during high VSWR conditions
Output transistors are beta-matched to assure reliability
Broadband, low Q circuits inhibit squeeging and self-resonant oscillations
CPS 1001:
Output power: 1000W
Control I/O connector: 15-pin subminiature D type (female)
Input line voltage: 208VAC; three phase; 50/60 Hz; 6A max.
Cooling: Water: 1.5 GPM (5.7 liters), 35 degrees C max.
Water connections: 1/4" NPT female, inlet & outlet
Size: 5.25"H x 19"W x 16"D (13.3cm x 48.3cm x 40.6cm)
