The CX high frequency series is available in power ranges of 5000 and 10,000 Watts with fixed frequencies from 2 to 30 MHz, and frequency agile capability up to 10% bandwidth. The CX series provides precise, repeatable power control with ultra-stable output. The solid-state design provides low cost of ownership with high reliability.
Applications:
The CX series is designed to meet the performance demand in RF-driven plasma systems for semiconductor processing. Applications include etch, RIE, parallel plate, ICP, RF sputtering, CVD and PVD, as well as induction and dielectric heating processes in industrial systems, and solar photovoltaic applications.
Features:
Patented S-Technology provides ultra-stable output. This stabilizing technology optimizes amplifier performance, reducing power-gain changes caused by plasma impedance fluctuations.
ETL Marked for product safety and SEMI F47 compliant
Standard RS-232 and analog/digital control
Active front panel with full controls and programmable microprocessor
General Specifications:
Frequency: Any fixed frequency from 2 to 30 MHz
Frequency stability: +/- 0.005%
Load impedance: 50 ohms nominal
Analog power command: 0-10 VDC or 0-5 VDC for 0 to maximum output
Standard available output connector: HN, LC or 7/16
Line regulation: 1% for +/- 10% line
Load regulation: 3% from 10-100% setpoint before SWR foldback
Power control linearity: Better than 2% of setting at power levels above 10% of rated power
