Performance:
The CDX dual frequency RF generator comes in a 1200 or 2000 watt design. The high frequency (HF) section of the CDX provides 600 or 1000 watts of power, with optional frequencies from 2 to 60 MHz. The low frequency (LF) section can deliver 600 or 1000 watts, with optional fixed or variable frequencies ranging from 20 kHz to our new 13.56 MHz (see new Dual High Frequency Power Supply below).
Applications:
This solid-state generator is ideal for plasma applications including bias, etch, deposition and ashing in semiconductor processing, as well as solar cell and photovoltaic applications.
Features:
Compact packaging reduces space, service (electrical and plumbing), and spare inventory requirements
Complies to CE-Mark standards and is ETL Marked and SEMI F47 compliant
Protection circuits safeguard the amplifiers from over-voltage, over-current and over-power operating conditions
Gain-control circuitry stabilizes output power against line and load variations, and limits power during high VSWR conditions
Unique power monitoring in the low-frequency section measures delivered power into any impedance load
Optional phase locked output in the low- frequency section eliminates the need for a matching network in many applications
