The SD1024D was designed for demanding semiconductor process applications. Its optical system employs a 1024-element, scientific-grade CCD array specifically designed for multi-channel spectroscopy, offering high performance at a moderate cost. The advantages of the SD1024D include excellent ultraviolet (UV) response (down to 200nm), stability against degradation under UV exposure, high sensitivity, wide dynamic range and superior output linearity. The unique optical platform results in highly efficient imaging of spectral information at the element of the two dimensional detector array.