For maximum process repeatability and consistency, modern plasma applications require precise RF power regulation and control. A key component in ensuring accurate & repeatable RF power delivery to the chamber is calibration, regulation & monitoring of the RF generator. Bird now offers ultra-stable, low VSWR loads for quick and precise measurement of generator power output when used with precision power sensors such as the Bird 4020 series.
ADVANTAGES:
No warm-up time
Ultra stable: less than 0.1dB total change in VSWR from 0 to 100 percent rating power at 13.56 MHz
Passive design
Ultra-low VSWR - typically less than 1.05:1 at process critical frequencies
